I typed, “Silicon wafer cleaning Green chemistry” into Google today to find out more about Legacy Holdings Inc’s competitors. To my surprise, three out of the top five results all headlined Legacy.
One of the other results was an abstract describing the “Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone”. For those of you who have none to little knowledge on the subject, it is a cleaning process that utilizes anhydrous hydrofluoric acid/methanol (AHF) and ozone in a vapor phase cleaning module (VPC). I know it still doesn’t make much sense.
That is why I am here. To educate you on environmentally safe Silicon Wafer cleaning technologies. Currently Legacy Holdings Inc is at the foreground with their patented DryZone TM and Coldstrip TM processes.
DryZoneTM is a revolutionary new solvent gradient dryer that exceeds environmental standards for the industry. The top layers of silicon wafers are rinsed in deionized water in order to remove any super fine dust particles added to the water during fabrication. Once this step is completed, they are processed through an ozone chamber, with or without ultraviolet light exposure, to convert all traces of organic materials to carbon dioxide gas.
The dryer apparatus does not emit any organic chemicals that are capable of vaporizing and enter the atmosphere under normal conditions. The DryZoneTM process uses reactive chemistries, which is a particle reducer as opposed to the alternative method that utilizes isopropyl alcohol consuming dryers which is a particle neutralizer. This makes Legacy Holdings Inc’s DryZoneTM technology ahead of its competition when it comes to a being green.
ColdstripTM, the product that won LGYH an award in 1997, uses oxygen and water as raw materials. This significantly benefits the environment and the pockets of chip producers. As opposed to their competitors who primarily use toxic solutions which leaves large negative footprints on the environment with no extra cost saving incentives.
ColdstripTM not only eliminates over 8,400 gallons of liquid toxins per year per silicon-wet station and over 25,500 gallons per year per flat panel display station. It also reduces the water consumption by over 3,355,800 gallons per year per silicon-wet station and over 5,033,700 gallons per year per flat panel display station. If that isn’t enough to impress you, LGYH water consumption is minuscule with only 4,200 gallons per year. Oh yeah they also don’t use any toxins in their process.
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